Scanning electron microscope completely controlled under WindowNT; currently equipped with tungsten tip for high beam currents; large specimen chamber (379x280 mm door size). Voltage: 200 - 30 kV; Resolution: 3.0 nm @30kV; 10 nm @3kV.
Detectors:
Oxford CL2 cathodoluminescence system with cooling stage. Back scattering detector for Z-imaging.